Real-time process monitoring

32

In Situ Measurement of Carbon Nanotube Growth Kinetics in a Rapid Thermal Chemical Vapor Deposition Reactor with Multizone Infrared Heating

Moataz Abdulhafez, Jaegeun Lee, and Mostafa Bedewy
ASME Journal of Micro and Nano-Manufacturing, 2019
29

Multizone Rapid Thermal Processing to Overcome Challenges in Carbon Nanotube Manufacturing by Chemical Vapor Deposition

Jaegeun Lee, Moataz Abdulhafez, and Mostafa Bedewy
ASME Journal of Manufacturing Science and Engineering, 2019
28

Data analytics enables significant improvement of robustness in chemical vapor deposition of carbon nanotubes based on vacuum baking

Jaegeun Lee, Moataz Abdulhafez, and Mostafa Bedewy
Industrial & Engineering Chemistry Research, 2019